Integration of a high-NA light microscope in a scanning electron microscope
نویسندگان
چکیده
منابع مشابه
Integration of a high-NA light microscope in a scanning electron microscope.
We present an integrated light-electron microscope in which an inverted high-NA objective lens is positioned inside a scanning electron microscope (SEM). The SEM objective lens and the light objective lens have a common axis and focal plane, allowing high-resolution optical microscopy and scanning electron microscopy on the same area of a sample simultaneously. Components for light illumination...
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ژورنال
عنوان ژورنال: Journal of Microscopy
سال: 2013
ISSN: 0022-2720
DOI: 10.1111/jmi.12071